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Hybrid Plasma Equipment Model (HPEM)

http://uigelz.eecs.umich.edu/pub/odp_files/hpem_intro.pdf

Code developed by prof. M.J. Kushner and his group for 2D numerical simulation of reactive ion etching reactors.

Submitted in section: Physics: Plasma: Software: Hybrid Plasma Equipment Model (HPEM)

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